| A high-performance planar piezoresistive accelerometer A Partridge, JK Reynolds, BW Chui, EM Chow, AM Fitzgerald, L Zhang, ... Journal of microelectromechanical systems 9 (1), 58-66, 2000 | 296 | 2000 |
| Design of a wireless active sensing unit for structural health monitoring JP Lynch, A Sundararajan, KH Law, H Sohn, CR Farrar Health Monitoring and Smart Nondestructive Evaluation of Structural and …, 2004 | 255 | 2004 |
| Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators RN Candler, MA Hopcroft, B Kim, WT Park, R Melamud, M Agarwal, ... Journal of Microelectromechanical Systems 15 (6), 1446-1456, 2006 | 248 | 2006 |
| Single wafer encapsulation of MEMS devices RN Candler, WT Park, H Li, G Yama, A Partridge, M Lutz, TW Kenny IEEE transactions on advanced packaging 26 (3), 227-232, 2003 | 234 | 2003 |
| Design of piezoresistive MEMS-based accelerometer for integration with wireless sensing unit for structural monitoring JP Lynch, A Partridge, KH Law, TW Kenny, AS Kiremidjian, E Carryer Journal of Aerospace Engineering 16 (3), 108-114, 2003 | 217 | 2003 |
| Impact of geometry on thermoelastic dissipation in micromechanical resonant beams RN Candler, A Duwel, M Varghese, SA Chandorkar, MA Hopcroft, ... Journal of Microelectromechanical Systems 15 (4), 927-934, 2006 | 174 | 2006 |
| Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution CH Liu, AM Barzilai, JK Reynolds, A Partridge, TW Kenny, JD Grade, ... Journal of Microelectromechanical Systems 7 (2), 235-244, 1998 | 165 | 1998 |
| Frequency and/or phase compensated microelectromechanical oscillator A Partridge, M Lutz US Patent 6,995,622, 2006 | 161 | 2006 |
| Method of fabricating microelectromechanical systems and devices having trench isolated contacts A Partridge, M Lutz, S Kronmueller US Patent 6,936,491, 2005 | 158 | 2005 |
| Process compatible polysilicon-based electrical through-wafer interconnects in silicon substrates EM Chow, V Chandrasekaran, A Partridge, T Nishida, M Sheplak, ... Journal of Microelectromechanical systems 11 (6), 631-640, 2002 | 133 | 2002 |
| A Temperature-to-Digital Converter for a MEMS-Based Programmable Oscillator With Frequency Stability and Integrated Jitter MH Perrott, JC Salvia, FS Lee, A Partridge, S Mukherjee, C Arft, J Kim, ... IEEE Journal of Solid-State Circuits 48 (1), 276-291, 2012 | 118 | 2012 |
| Microelectromechanical systems and devices having thin film encapsulated mechanical structures A Partridge, M Lutz, S Kronmueller US Patent 7,075,160, 2006 | 117 | 2006 |
| A 3 ppm 1.5× 0.8 mm 2 1.0 µA 32.768 kHz MEMS-Based Oscillator S Zaliasl, JC Salvia, GC Hill, L Chen, K Joo, R Palwai, N Arumugam, ... IEEE Journal of Solid-State Circuits 50 (1), 291-302, 2014 | 116 | 2014 |
| MEMS oscillators for high volume commercial applications M Lutz, A Partridge, P Gupta, N Buchan, E Klaassen, J McDonald, ... TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007 | 111 | 2007 |
| Episeal pressure sensor and method for making an episeal pressure sensor A Partridge, M Lutz US Patent 6,928,879, 2005 | 111 | 2005 |
| Anti-stiction technique for electromechanical systems and electromechanical device employing same M Lutz, A Partridge, W Frey, M Ulm, M Metz, B Stark, G Yama US Patent 7,449,355, 2008 | 108 | 2008 |
| Method for adjusting the frequency of a MEMS resonator M Lutz, A Partridge US Patent 7,102,467, 2006 | 103 | 2006 |
| Microelectromechanical systems, and devices having thin film encapsulated mechanical structures A Partridge, M Lutz, S Kronmueller US Patent 7,288,824, 2007 | 101 | 2007 |
| New thin film epitaxial polysilicon encapsulation for piezoresistive accelerometers A Partridge, AE Rice, TW Kenny, M Lutz Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro …, 2001 | 90 | 2001 |
| Temperature controlled MEMS resonator and method for controlling resonator frequency M Lutz, A Partridge US Patent 7,068,125, 2006 | 88 | 2006 |
