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Andreas Langner
Andreas Langner
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Verified email at andreaslangner.eu
Title
Cited by
Cited by
Year
Sub-10 nm patterning using EUV interference lithography
B Päivänranta, A Langner, E Kirk, C David, Y Ekinci
Nanotechnology 22 (37), 375302, 2011
2082011
A capacitive humidity sensor based on ordered macroporous silicon with thin film surface coating
Y Wang, S Park, JTW Yeow, A Langner, F Müller
Sensors and Actuators B: Chemical 149 (1), 136-142, 2010
1372010
Nondestructive replication of self-ordered nanoporous alumina membranes via cross-linked polyacrylate nanofiber arrays
S Grimm, R Giesa, K Sklarek, A Langner, U Gösele, HW Schmidt, ...
Nano letters 8 (7), 1954-1959, 2008
912008
Generation of extreme ultraviolet vortex beams using computer generated holograms
B Terhalle, A Langner, B Päivänranta, VA Guzenko, C David, Y Ekinci
Optics letters 36 (21), 4143-4145, 2011
542011
Fabrication of quasiperiodic nanostructures with EUV interference lithography
A Langner, B Päivänranta, B Terhalle, Y Ekinci
Nanotechnology 23 (10), 105303, 2012
362012
Advanced holographic methods in extreme ultraviolet interference lithography
B Terhalle, A Langner, B Päivänranta, Y Ekinci
Nanoengineering: Fabrication, Properties, Optics, and Devices VIII 8102, 132-138, 2011
202011
TiO2 microstructures by inversion of macroporous silicon using atomic layer deposition
A Langner, M Knez, F Müller, U Gösele
Applied Physics A 93, 399-403, 2008
202008
Large-aperture MOEMS Fabry-Perot interferometer for miniaturized spectral imagers
A Rissanen, A Langner, KH Viherkanto, R Mannila
MOEMS and Miniaturized Systems XIV 9375, 120-127, 2015
182015
Measuring resist-induced contrast loss using EUV interference lithography
A Langner, HH Solak, R Gronheid, E van Setten, V Auzelyte, Y Ekinci, ...
Extreme Ultraviolet (EUV) Lithography 7636, 878-888, 2010
162010
Thermal development of a calixarene resist
V Auzelyte, A Langner, HH Solak
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2009
162009
Formation of straight 10 nm diameter silicon nanopores in gold decorated silicon
CC Buttner, A Langner, M Geuss, F Muller, P Werner, U Gosele
ACS nano 3 (10), 3122-3126, 2009
152009
Macroporous silicon
A Langner, F Müller, U Gösele
Molecular-and nano-tubes, 431-460, 2011
142011
Fabrication and characterization of macroporous silicon
A Langner
62008
Applications of the high resolution optical reconstruction of digital holograms
G Wernicke, J Frank, H Gruber, M Dürr, A Langner, S Eisebitt, C Günther, ...
Practical Holography XX: Materials and Applications 6136, 228-235, 2006
42006
Herstellung von Nanostrukturen mittels Atomlagenabscheidung
A Langner, M Knez, U Gösele
Chemie Ingenieur Technik 80 (11), 1719-1724, 2008
12008
Nanostructure creation by atom layer truncation
A Langner, M Knez, U Gosele
Chemie Ingenieur Technik 80 (11), 1719-1724, 2008
2008
Characterization of photonic crystals via negative refraction
A Langner, F Müller
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Articles 1–17