Temperature-compensated aluminum nitride Lamb wave resonators CM Lin, TT Yen, YJ Lai, VV Felmetsger, MA Hopcroft, JH Kuypers, ... IEEE transactions on ultrasonics, ferroelectrics, and frequency control 57 …, 2010 | 196 | 2010 |
Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications CM Lin, TT Yen, VV Felmetsger, MA Hopcroft, JH Kuypers, AP Pisano Applied Physics Letters 97 (8), 2010 | 136 | 2010 |
Intrinsic temperature compensation of aluminum nitride Lamb wave resonators for multiple-frequency references JH Kuypers, CM Lin, G Vigevani, AP Pisano 2008 IEEE International Frequency Control Symposium, 240-249, 2008 | 116 | 2008 |
Method of manufacturing a mechanical resonating structure F Thalmayr, JH Kuypers, KJ Schoepf US Patent 9,762,202, 2017 | 75 | 2017 |
Method of manufacturing a mechanical resonating structure F Thalmayr, JH Kuypers, KJ Schoepf US Patent 9,762,202, 2017 | 75 | 2017 |
Surface micromachined AlN thin film 2 GHz resonator for CMOS integration M Hara, J Kuypers, T Abe, M Esashi Sensors and Actuators A: Physical 117 (2), 211-216, 2005 | 73 | 2005 |
Mechanical resonating structures including a temperature compensation structure DM Chen, JH Kuypers, A Gaidarzhy, G Zolfagharkhani US Patent 8,058,769, 2011 | 62 | 2011 |
Mechanical resonating structures including a temperature compensation structure DM Chen, JH Kuypers, A Gaidarzhy, G Zolfagharkhani US Patent 8,058,769, 2011 | 62 | 2011 |
Maximum accuracy evaluation scheme for wireless SAW delay-line sensors JH Kuypers, LM Reindl, S Tanaka, M Esashi ieee transactions on ultrasonics, ferroelectrics, and frequency control 55 …, 2008 | 60 | 2008 |
Process temperature–dependent mechanical properties of polysilicon measured using a novel tensile test structure S Kamiya, JH Kuypers, A Trautmann, P Ruther, O Paul Journal of microelectromechanical systems 16 (2), 202-212, 2007 | 53 | 2007 |
Integration of piezoelectric materials with substrates DM Chen, JH Kuypers, A Gaidarzhy, G Zolfagharkhani US Patent 8,766,512, 2014 | 52 | 2014 |
Integration of piezoelectric materials with substrates DM Chen, JH Kuypers, A Gaidarzhy, G Zolfagharkhani US Patent 8,766,512, 2014 | 52 | 2014 |
Microelectromechanical systems (MEMS) resonators and related apparatus and methods DM Chen, JH Kuypers, P Mohanty, KJ Schoepf, G Zolfagharkhani, ... US Patent 8,476,809, 2013 | 52 | 2013 |
Microelectromechanical systems (MEMS) resonators and related apparatus and methods DM Chen, JH Kuypers, P Mohanty, KJ Schoepf, G Zolfagharkhani, ... US Patent 8,476,809, 2013 | 52 | 2013 |
Multi-port mechanical resonating devices and related methods JH Kuypers, R Rebel, A Gaidarzhy, DM Chen, G Zolfagharkhani, ... US Patent 8,686,614, 2014 | 47 | 2014 |
Multi-port mechanical resonating devices and related methods JH Kuypers, R Rebel, A Gaidarzhy, DM Chen, G Zolfagharkhani, ... US Patent 8,686,614, 2014 | 47 | 2014 |
Green's function analysis of Lamb wave resonators JH Kuypers, AP Pisano 2008 IEEE Ultrasonics Symposium, 1548-1551, 2008 | 40 | 2008 |
Integration of piezoelectric materials with substrates DM Chen, JH Kuypers, A Gaidarzhy, G Zolfagharkhani, J Goodelle US Patent 8,466,606, 2013 | 39 | 2013 |
Integration of piezoelectric materials with substrates DM Chen, JH Kuypers, A Gaidarzhy, G Zolfagharkhani, J Goodelle US Patent 8,466,606, 2013 | 39 | 2013 |
Integration of piezoelectric materials with substrates DM Chen, JH Kuypers, A Gaidarzhy, G Zolfagharkhani, J Goodelle US Patent 8,466,606, 2013 | 39 | 2013 |