| Parameter study for silicon grass formation in Bosch process KB Jung, WJ Song, HW Lim, CS Lee Journal of Vacuum Science & Technology B 28 (1), 143-148, 2010 | 28 | 2010 |
| Nickel line patterning using silicon supersonic micronozzle integrated with a nanoparticle deposition system K Jung, W Song, DM Chun, YH Kim, JC Yeo, MS Kim, SH Ahn, CS Lee Japanese Journal of Applied Physics 49 (5S1), 05EC09, 2010 | 26 | 2010 |
| DEPOSITION OF Al2O3 POWDERS USING NANO-PARTICLE DEPOSITION SYSTEM W Song, K Jung, DM Chun, SH Ahn, CS Lee Surface Review and Letters 17 (02), 189-193, 2010 | 26 | 2010 |
| Study of SiGe oxidation kinetics for preferential SiO2 formation under a low O2 pressure condition W Song, A Toriumi Journal of Applied Physics 122 (18), 2017 | 15 | 2017 |
| Coating of Ni powders through micronozzle in a nano particle deposition system KB Jung, WJ Song, DM Chun, JC Yeo, MS Kim, SH Ahn, CS Lee Metals and Materials International 16, 465-467, 2010 | 15 | 2010 |
| Nanoparticle deposition of Al2O3 powders on various substrates W Song, K Jung, DM Chun, SH Ahn, CS Lee Materials transactions 50 (11), 2680-2684, 2009 | 9 | 2009 |
| Interface reaction kinetics in SiGe oxidation X Li, Y Noma, W Song, T Nishimura, A Toriumi Applied Physics Letters 115 (23), 2019 | 8 | 2019 |
| Fine-Sized Etching of Flexible Substrates Using Nano Particle Deposition System (NPDS) W Song, YH Kim, MS Kim, SH Ahn, CS Lee Materials transactions 51 (11), 2099-2103, 2010 | 4 | 2010 |
| Effect of duty cycle on various etching widths during bosch process W Song, K Jung, M Seong, HW Lim Journal of Ceramic Processing Research 10 (6), 791-793, 2009 | 3 | 2009 |
| How Ge atoms behave in thermal oxidation of SiGe? X Li, Y Noma, W Song, T Nishimura, A Toriumi JSAP Annual Meetings Extended Abstracts The 79th JSAP Autumn Meeting 2018 …, 2018 | | 2018 |
| Anomalous Spectral Shape Evolution of Ge Raman Shift in Oxidation of SiGe Y Noma, W Song, T Nishimura, T Yajima, A Toriumi 2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM …, 2018 | | 2018 |
| Atomic exchange between Ge and Si at GeO2/Si interface W Song, A Toriumi JSAP Annual Meetings Extended Abstracts The 64th JSAP Spring Meeting 2017 …, 2017 | | 2017 |
| Oxidation Kinetics of Ge by Oxygen Radicals at Low Temperatures and Electrical Properties of GeO2/Ge Gate Stacks W Song, CH Lee, T Nishimura, K Nagashio, A Toriumi Conference: 2012 International Conference on Solid State Devices and Materials, 2012 | | 2012 |
