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Fedor Trintchouk
Fedor Trintchouk
Singular Genomics
Verified email at singulargenomics.com
Title
Cited by
Cited by
Year
Measurement of lower-hybrid drift turbulence in a reconnecting current sheet
TA Carter, H Ji, F Trintchouk, M Yamada, RM Kulsrud
Physical review letters 88 (1), 015001, 2001
1412001
Experimental investigation of the neutral sheet profile during magnetic reconnection
M Yamada, H Ji, S Hsu, T Carter, R Kulsrud, F Trintchouk
Physics of Plasmas 7 (5), 1781-1787, 2000
1092000
Experimental study of lower-hybrid drift turbulence in a reconnecting current sheet
TA Carter, M Yamada, H Ji, RM Kulsrud, F Trintchouk
Physics of Plasmas 9 (8), 3272-3288, 2002
822002
Measurement of the transverse Spitzer resistivity during collisional magnetic reconnection
F Trintchouk, M Yamada, H Ji, RM Kulsrud, TA Carter
Physics of Plasmas 10 (1), 319-322, 2003
792003
Visualization of plasma turbulence with laser-induced fluorescence
FM Levinton, F Trintchouk
Review of Scientific Instruments 72 (1), 898-905, 2001
292001
High power high pulse repetition rate gas discharge laser system bandwidth management
RL Sandstrom, WN Partlo, DJW Brown, JM Algots, F Trintchouk
282006
Impact of finite laser bandwidth on the critical dimension of L/S structures
P De Bisschop, I Lalovic, F Trintchouk
Journal of Micro/Nanolithography, MEMS and MOEMS 7 (3), 033001-033001-16, 2008
262008
Dual-chamber ultra line-narrowed excimer light source for 193-nm lithography
VB Fleurov, DJ Colon III, DJW Brown, P O'Keeffe, H Besaucele, AI Ershov, ...
Optical Microlithography XVI 5040, 1694-1703, 2003
262003
Method and apparatus for gas discharge laser bandwidth and center wavelength control
FB Trintchouk, RN Jacques
US Patent 7,643,522, 2010
252010
Automatic gas control system for a gas discharge laser
JA Rule, RC Morton, VV Fleurov, F Trintchouk, T Ishihara, AI Ershov, ...
US Patent 6,963,595, 2005
252005
XLR 600i: recirculating ring ArF light source for double patterning immersion lithography
V Fleurov, S Rokitski, R Bergstedt, H Ye, K O’Brien, R Jacques, ...
Optical Microlithography XXI 6924, 618-622, 2008
212008
Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control
HA Besaucele, WJ Dunstan, T Ishihara, RN Jacques, FB Trintchouk
US Patent 7,741,639, 2010
202010
Active spectral control of DUV light source
WJ Dunstan, RN Jacques, RM Rao, FB Trintchouk
US Patent 7,852,889, 2010
192010
Gas discharge laser output light beam parameter control
HA Besaucele, IV Fomenkov, WN Partlo, FB Trintchouk, HT That
US Patent 7,471,708, 2008
192008
Active Spectral Control of DUV light sources for OPE minimization
WJ Dunstan, R Jacques, RJ Rafac, R Rao, F Trintchouk
Optical Microlithography XIX 6154, 850-858, 2006
172006
XLA-300: the fourth-generation ArF MOPA light source for immersion lithography
F Trintchouk, T Ishihara, W Gillespie, R Ness, R Bergstedt, C Wittak, ...
Optical Microlithography XIX 6154, 719-727, 2006
102006
Method and apparatus for controlling light bandwidth
KM O'brien, FB Trintchouk
US Patent 8,837,536, 2014
82014
Enabling high volume manufacturing of double patterning immersion lithography with the XLR 600ix ArF light source
R Rokitski, V Fleurov, R Bergstedt, H Ye, R Rafac, R Jacques, ...
Optical Microlithography XXII 7274, 1170-1177, 2009
72009
Production-ready 4-kHz ArF laser for 193-nm lithography
C Oh, VB Fleurov, T Hofmann, TP Duffey, F Trintchouk, P O'Keeffe, ...
Optical Microlithography XV 4691, 1753-1760, 2002
72002
Phys. Plasmas
TA Carter, M Yamada, H Ji, RM Kulsrud, F Trintchouk
Phys. Plasmas 9 (5097), 2002
72002
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