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Shenqi Xie
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Resistless nanofabrication by stencil lithography: A review
O Vazquez-Mena, L Gross, S Xie, LG Villanueva, J Brugger
Microelectronic Engineering 132, 236-254, 2015
1262015
Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer
J Wan, SR Deng, R Yang, Z Shu, BR Lu, SQ Xie, Y Chen, E Huq, R Liu, ...
Microelectronic Engineering 86 (4-6), 1238-1242, 2009
522009
A nanoimprint lithography for fabricating SU-8 gratings for near-infrared to deep-UV application
SQ Xie, J Wan, BR Lu, Y Sun, Y Chen, XP Qu, R Liu
Microelectronic Engineering 85 (5-6), 914-917, 2008
352008
Fabrication of micro/nano fluidic channels by nanoimprint lithography and bonding using SU-8
R Yang, BR Lu, J Wan, SQ Xie, Y Chen, E Huq, XP Qu, R Liu
Microelectronic Engineering 86 (4-6), 1379-1381, 2009
272009
Electro-mechanical sensing in freestanding monolayered gold nanoparticle membranes
M Gauvin, J Grisolia, T Alnasser, B Viallet, S Xie, J Brugger, L Ressier
Nanoscale 8 (22), 11363-11370, 2016
232016
Plasmonic photo-current in freestanding monolayered gold nanoparticle membranes
M Gauvin, T Alnasser, E Terver, I Abid, A Mlayah, S Xie, J Brugger, ...
Nanoscale 8 (36), 16162-16167, 2016
172016
Nanofabrication of SiC templates for direct hot embossing for metallic photonic structures and meta materials
Y Chen, Y Zhou, G Pan, E Huq, BR Lu, SQ Xie, J Wan, Z Shu, XP Qu, ...
Microelectronic engineering 85 (5-6), 1147-1151, 2008
122008
Microelectron. Eng
BR Lu, J Wan, SQ Xie, Z Shu, Y Sun, Y Chen, XP Qu, R Liu
122008
100 mm dynamic stencils pattern sub-micrometre structures
V Savu, S Xie, J Brugger
Nanoscale 3 (7), 2739-2742, 2011
112011
Optical nanostructures fabricated by SU-8 based nanoimprint lithography
R Liu, BR Lu, SQ Xie, J Wan, Z Shu, XP Qu, Y Chen
J. Korean Phys. Soc 55 (3), 1290-1294, 2009
112009
Vertically-stacked gate-all-around polysilicon nanowire FETs with sub-μm gates patterned by nanostencil lithography
D Sacchetto, S Xie, V Savu, M Zervas, G De Micheli, J Brugger, ...
Microelectronic engineering 98, 355-358, 2012
102012
Robust PECVD SiC membrane made for stencil lithography
S Xie, V Savu, W Tang, O Vazquez-Mena, K Sidler, H Zhang, J Brugger
Microelectronic engineering 88 (8), 2790-2793, 2011
92011
Nanophotonic crystals with chiral elements by a hot embossing process in SU-8
BR Lu, J Wan, SQ Xie, Z Shu, Y Sun, Y Chen, XP Qu, R Liu
Microelectronic engineering 85 (5-6), 866-869, 2008
92008
Arrays of pentacene single crystals by stencil evaporation
P Fesenko, V Flauraud, S Xie, J Brugger, J Genoe, P Heremans, C Rolin
Crystal Growth & Design 16 (8), 4694-4700, 2016
82016
Metallic and dielectric photonic crystals with chiral elements by combined nanoimprint and reversal lithography in SU-8
BR Lu, J Wan, Z Shu, SQ Xie, Y Chen, E Huq, XP Qu, R Liu
Microelectronic engineering 86 (4-6), 619-621, 2009
82009
Duplication of nanoimprint templates by a novel SU-8/SiO2/PMMA trilayer technique
J Wan, Z Shu, SR Deng, SQ Xie, BR Lu, R Liu, Y Chen, XP Qu
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2009
82009
Applications of nanoimprint lithography for biochemical and nanophotonic structures using SU-8
B Lu, SQ Xie, J Wan, R Yang, Z Shu, XP Qu, R Liu, Y Chen, E Huq
International Journal of Nanoscience 8 (01n02), 151-155, 2009
62009
Effects of tensile stress on electrical parameters of thin film conductive wires fabricated on a flexible substrate using stencil lithography
M Frantlović, I Jokić, V Savu, S Xie, J Brugger
Microelectronic engineering 98, 230-233, 2012
52012
Growth of organic semiconductor thin films with multi-micron domain size and fabrication of organic transistors using a stencil nanosieve
P Fesenko, V Flauraud, S Xie, E Kang, T Uemura, J Brugger, J Genoe, ...
ACS applied materials & interfaces 9 (28), 23314-23318, 2017
42017
Fabrication of 150 nm half-pitch grating templates for nanoimprint lithography
SQ Xie, BR Lu, Y Sun, Y Chen, XP Qu, R Liu
Journal of Nanoscience and Nanotechnology 9 (2), 1437-1440, 2009
42009
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