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Örjan Vallin
Örjan Vallin
Researcher at Ångström Microstructure Laboratory, Uppsala University
Verified email at angstrom.uu.se
Title
Cited by
Cited by
Year
Adhesion quantification methods for wafer bonding
Ö Vallin, K Jonsson, U Lindberg
Materials Science and Engineering: R: Reports 50 (4-5), 109-165, 2005
1502005
Inversion in metal–oxide–semiconductor capacitors on boron-doped diamond
KK Kovi, Ö Vallin, S Majdi, J Isberg
IEEE Electron Device Letters 36 (6), 603-605, 2015
322015
Quartz‐to‐Quartz Direct Bonding
P Rangsten, Ö Vallin, K Hermansson, Y Bäcklund
Journal of the Electrochemical Society 146 (3), 1104, 1999
241999
LDMOS-transistors on semi-insulating silicon-on-polycrystalline-silicon carbide substrates for improved RF and thermal properties
S Lotfi, LG Li, Ö Vallin, L Vestling, H Norström, J Olsson
Solid-State Electronics 70, 14-19, 2012
202012
Elevated thermoelectric figure of merit of n-type amorphous silicon by efficient electrical doping process
D Banerjee, Ö Vallin, KM Samani, S Majee, SL Zhang, J Liu, ZB Zhang
Nano Energy 44, 89-94, 2018
182018
High thermoelectric power factor of p-type amorphous silicon thin films dispersed with ultrafine silicon nanocrystals
NH Pham, Ö Vallin, J Panda, M Venkata Kamalakar, J Guo, J Luo, C Wen, ...
Journal of Applied Physics 127 (24), 2020
112020
Direct bonded quartz resonators
O Vallin, B Einefors, C Hedlund, G Thornell
Proceedings of the 2001 IEEE International Frequncy Control Symposium and …, 2001
102001
Electrical properties of Ag/Ta and Ag/TaN thin-films
S Mardani, D Primetzhofer, L Liljeholm, Ö Vallin, H Norström, J Olsson
Microelectronic engineering 120, 257-261, 2014
72014
Oxygen out-diffusion from buried layers in SOI and SiC–SOI substrates
LG Li, Ö Vallin, J Lu, U Smith, H Norström, J Olsson
Solid-state electronics 54 (2), 153-157, 2010
72010
Silicon fusion bond interfaces resilient to wet anisotropic etchants
J Köhler, C Strandman, Ö Vallin, C Hedlund, Y Bäcklund
Journal of Micromechanics and Microengineering 11 (4), 359, 2001
72001
Novel silicon-on-SiC substrate with superior thermal and RF performance
J Olsson, O Vallin, G Sjoblom, H Norstrom, U Smith, L Vestling, S Berg
2007 IEEE International SOI Conference, 115-116, 2007
62007
Polishing of quartz by rapid etching in ammonium bifluoride
O Vallin, R Danielsson, U Lindberg, G Thornell
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 54 …, 2007
62007
High-temperature piezoresistive gauge fabricated on commercially available silicon-on-insulator wafers
Ö Vallin, Y Bäcklund
Journal of Micromechanics and Microengineering 10 (2), 196, 2000
62000
Dynamics of SiO2 Buried Layer Removal from Si-SiO2-Si and Si-SiO2-SiC Bonded Substrates by Annealing in Ar
LG Li, S Rubino, Ö Vallin, J Olsson
Journal of electronic materials 43, 541-547, 2014
52014
Hybrid Wafers
S Berg, J Olsson, Ö Vallin, U Smith
US Patent App. 12/298,336, 2009
52009
Strength of bonded interfaces
Ö Vallin, K Jonsson, R Knechtel
Handbook of Silicon Based MEMS Materials and Technologies, 823-832, 2020
42020
Morphological instability of Ag films caused by phase transition in the underlying Ta barrier layer
S Mardani, Ö Vallin, JT Wätjen, H Norström, J Olsson, SL Zhang
Applied Physics Letters 105 (7), 2014
42014
Thermal characterization of polycrystalline SiC
LG Li, S Lotfi, Ö Vallin, J Olsson
Journal of electronic materials 43, 1150-1153, 2014
42014
Fabrication and characterization of 150-mm silicon-on-polycrystalline silicon carbide substrates
S Lotfi, LG Li, Ö Vallin, H Norström, J Olsson
Journal of electronic materials 41, 480-487, 2012
42012
Buried aluminum nitride insulator for improving thermal conduction in SOI
DM Martin, O Vallin, I Katardjiev, J Olsson
2008 IEEE International SOI Conference, 105-106, 2008
42008
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Articles 1–20