100-GHz transistors from wafer-scale epitaxial graphene YM Lin, C Dimitrakopoulos, KA Jenkins, DB Farmer, HY Chiu, A Grill, ...
Science 327 (5966), 662-662, 2010
3260 2010 Diamond-like carbon: state of the art A Grill
Diamond and related materials 8 (2-5), 428-434, 1999
1358 1999 Cold plasma in materials fabrication A Grill
IEEE Press, New York, 1994
1201 1994 Wafer-scale graphene integrated circuit YM Lin, A Valdes-Garcia, SJ Han, DB Farmer, I Meric, Y Sun, Y Wu, ...
Science 332 (6035), 1294-1297, 2011
1138 2011 Structure of low dielectric constant to extreme low dielectric constant SiCOH films: Fourier transform infrared spectroscopy characterization A Grill, DA Neumayer
Journal of applied physics 94 (10), 6697-6707, 2003
856 2003 Tribology of diamondlike carbon and related materials: an updated review A Grill
Surface and Coatings Technology 94, 507-513, 1997
621 1997 Diamond-like carbon coatings as biocompatible materials—an overview A Grill
Diamond and related materials 12 (2), 166-170, 2003
580 2003 Hydrogenated oxidized silicon carbon material A Grill, CV Jahnes, VV Patel, LC Perraud
US Patent 6,147,009, 2000
519 2000 Multi component dielectric layer SM Gates, A Grill, S Van Nguyen, SV Nitta
US Patent 8,357,608, 2013
482 2013 Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made SM Gates, A Grill, DR Medeiros, D Neumayer, S Van Nguyen, VV Patel, ...
US Patent 7,049,247, 2006
460 2006 SiCOH dielectric A Afzali-Ardakani, S Gates, A Grill, D Neumayer, S Nguyen, V Patel
US Patent App. 11/336,726, 2007
447 2007 Review of the tribology of diamond-like carbon A Grill
Wear 168 (1-2), 143-153, 1993
444 1993 Transferable device-containing layer for silicon-on-insulator applications JO Chu, A Grill, DA Herman Jr, KL Saenger
US Patent 6,774,010, 2004
396 2004 Strained Si NMOSFETs for high performance CMOS technology K Rim, S Koester, M Hargrove, J Chu, PM Mooney, J Ott, T Kanarsky, ...
2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No …, 2001
346 2001 Ultralow- dielectrics prepared by plasma-enhanced chemical vapor deposition A Grill, V Patel
Applied Physics Letters 79 (6), 803-805, 2001
339 2001 Friction control of diamond-like carbon coatings C Donnet, A Grill
Surface and Coatings Technology 94, 456-462, 1997
329 1997 C-rich carbon boron nitride dielectric films for use in electronic devices S Van Nguyen, A Grill, TJ Haigh, S Mehta
US Patent 8,476,743, 2013
328 2013 Plasma enhanced chemical vapor deposited SiCOH dielectrics: from low-k to extreme low-k interconnect materials A Grill
Journal of Applied Physics 93 (3), 1785-1790, 2003
310 2003 Electrical and optical properties of diamond-like carbon A Grill
Thin solid films 355, 189-193, 1999
310 1999 Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects—State of the art A Grill, SM Gates, TE Ryan, SV Nguyen, D Priyadarshini
Applied Physics Reviews 1 (1), 2014
294 2014