| Fracture initiation at sharp notches: correlation using critical stress intensities ML Dunn, W Suwito, S Cunningham International Journal of Solids and structures 34 (29), 3873-3883, 1997 | 287 | 1997 |
| Trilayered beam MEMS device and related methods SJ Cunningham, S Tatic-Lucic US Patent 6,746,891, 2004 | 233 | 2004 |
| Fracture initiation at sharp notches under mode I, mode II, and mild mixed mode loading ML Dunn, W Suwito, S Cunningham, CW May International Journal of Fracture 84, 367-381, 1997 | 162 | 1997 |
| Stress intensities at notch singularities ML Dunn, W Suwito, S Cunningham Engineering Fracture Mechanics 57 (4), 417-430, 1997 | 153 | 1997 |
| Trilayered beam MEMS device and related methods SJ Cunningham, S Tatic-Lucic US Patent 6,917,086, 2005 | 140 | 2005 |
| Thermo-mechanical properties of alumina films created using the atomic layer deposition technique DC Miller, RR Foster, SH Jen, JA Bertrand, SJ Cunningham, AS Morris, ... Sensors and Actuators A: Physical 164 (1-2), 58-67, 2010 | 116 | 2010 |
| Elastic moduli, strength, and fracture initiation at sharp notches in etched single crystal silicon microstructures W Suwito, ML Dunn, SJ Cunningham, DT Read Journal of Applied Physics 85 (7), 3519-3534, 1999 | 108 | 1999 |
| MEMS device having a trilayered beam and related methods SJ Cunningham, DR DeReus, S Sett, S Tatic-Lucic US Patent 6,876,047, 2005 | 97 | 2005 |
| Electrothermal self-latching MEMS switch and method SJ Cunningham US Patent 6,882,264, 2005 | 78 | 2005 |
| Bulk micromachining process for fabricating an optical MEMS device with integrated optical aperture S Cunningham, S Tacic-Lucic, D DeReus US Patent App. 10/025,181, 2002 | 76 | 2002 |
| Application of bimaterial interface corner failure mechanics to silicon/glass anodic bonds PEW Labossiere, ML Dunn, SJ Cunningham Journal of the Mechanics and Physics of Solids 50 (3), 405-433, 2002 | 75 | 2002 |
| Micro-electro-mechanical system (MEMS) capacitors, inductors, and related systems and methods AS Morris III, SJ Cunningham US Patent 7,385,800, 2008 | 69 | 2008 |
| Micro-scale interconnect device with internal heat spreader and method for fabricating same S Sett, SJ Cunningham US Patent 6,847,114, 2005 | 69 | 2005 |
| Micro-scale interconnect device with internal heat spreader and method for fabricating same S Sett, SJ Cunningham US Patent 6,847,114, 2005 | 69 | 2005 |
| Initiation toughness of silicon/glass anodic bonds ML Dunn, SJ Cunningham, PEW Labossiere Acta materialia 48 (3), 735-744, 2000 | 65 | 2000 |
| Devices for fabricating tri-layer beams AS Morris III, D DeReus, SJ Cunningham US Patent 8,319,312, 2012 | 63 | 2012 |
| Method for fabricating a through-wafer optical MEMS device having an anti-reflective coating S Cunningham, S Tatic-Lucic, D DeReus US Patent App. 10/025,182, 2003 | 63 | 2003 |
| MEMS device having an actuator with curved electrodes S Cunningham, D DeReus US Patent App. 10/025,974, 2002 | 51 | 2002 |
| Fracture initiation at sharp notches in single crystal silicon W Suwito, ML Dunn, SJ Cunningham Journal of Applied Physics 83 (7), 3574-3582, 1998 | 49 | 1998 |
| CMOS integrated digital RF MEMS capacitors SP Natarajan, SJ Cunningham, AS Morris, DR Dereus 2011 IEEE 11th Topical Meeting on Silicon Monolithic Integrated Circuits in …, 2011 | 44 | 2011 |
