| High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps S Pourkamali, A Hashimura, R Abdolvand, GK Ho, A Erbil, F Ayazi Journal of Microelectromechanical Systems 12 (4), 487-496, 2003 | 244 | 2003 |
| VHF single crystal silicon capacitive elliptic bulk-mode disk resonators-part II: implementation and characterization S Pourkamali, Z Hao, F Ayazi Journal of Microelectromechanical Systems 13 (6), 1054-1062, 2004 | 162 | 2004 |
| Electronically temperature compensated silicon bulk acoustic resonator reference oscillators K Sundaresan, GK Ho, S Pourkamali, F Ayazi IEEE Journal of Solid-State Circuits 42 (6), 1425-1434, 2007 | 148 | 2007 |
| Electrically coupled MEMS bandpass filters: Part I: With coupling element S Pourkamali, F Ayazi Sensors and Actuators A: Physical 122 (2), 307-316, 2005 | 142 | 2005 |
| VHF single-crystal silicon elliptic bulk-mode capacitive disk resonators-part I: design and modeling Z Hao, S Pourkamali, F Ayazi Journal of Microelectromechanical Systems 13 (6), 1043-1053, 2004 | 134 | 2004 |
| High-frequency thermally actuated electromechanical resonators with piezoresistive readout A Rahafrooz, S Pourkamali IEEE Transactions on Electron Devices 58 (4), 1205-1214, 2011 | 128 | 2011 |
| Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators—Part I: Concept and fabrication S Pourkamali, GK Ho, F Ayazi IEEE Transactions on Electron Devices 54 (8), 2017-2023, 2007 | 123 | 2007 |
| Methods of forming oxide masks with submicron openings and microstructures formed thereby F Ayazi, R Abdolvand, SP Anaraki US Patent 7,056,757, 2006 | 103 | 2006 |
| Methods of forming oxide masks with submicron openings and microstructures formed thereby F Ayazi, R Abdolvand, SP Anaraki US Patent 7,056,757, 2006 | 103 | 2006 |
| Individual air-borne particle mass measurement using high-frequency micromechanical resonators A Hajjam, JC Wilson, S Pourkamali IEEE Sensors Journal 11 (11), 2883-2890, 2011 | 92 | 2011 |
| A finite element analysis of thermoelastic damping in vented MEMS beam resonators X Guo, YB Yi, S Pourkamali International Journal of Mechanical Sciences 74, 73-82, 2013 | 83 | 2013 |
| Capacitive resonators and methods of fabrication F Ayazi, SP Anaraki US Patent 7,023,065, 2006 | 81 | 2006 |
| Temperature compensated IBAR reference oscillators GKK Ho, K Sundaresan, S Pourkamali, F Ayazi 19th IEEE International Conference on Micro Electro Mechanical Systems, 910-913, 2006 | 80 | 2006 |
| Low-impedance VHF and UHF capacitive silicon bulk acoustic-wave resonators—Part II: Measurement and characterization S Pourkamali, GK Ho, F Ayazi IEEE Transactions on Electron Devices 54 (8), 2024-2030, 2007 | 79 | 2007 |
| Vertical capacitive sibars S Pourkamali, GK Ho, F Ayazi 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005 …, 2005 | 78 | 2005 |
| SOI-based HF and VHF single-crystal silicon resonators with sub-100 nanometer vertical capacitive gaps S Pourkamali, F Ayazi TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003 | 77 | 2003 |
| A low phase noise 100MHz silicon BAW reference oscillator K Sundaresan, GK Ho, S Pourkamali, F Ayazi IEEE Custom Integrated Circuits Conference 2006, 841-844, 2006 | 65 | 2006 |
| Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: II. Device fabrication and characterization A Hajjam, JC Wilson, A Rahafrooz, S Pourkamali Journal of Micromechanics and Microengineering 20 (12), 125019, 2010 | 59 | 2010 |
| Micromechanical IBARs: Tunable High- Resonators for Temperature-Compensated Reference Oscillators GK Ho, K Sundaresan, S Pourkamali, F Ayazi Journal of Microelectromechanical Systems 19 (3), 503-515, 2010 | 59 | 2010 |
| Low-motional-impedance highly-tunable I/sup 2/resonators for temperature-compensated reference oscillators GK Ho, K Sundaresan, S Pourkamali, F Ayazi 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005 …, 2005 | 59 | 2005 |
