| Gas-assisted focused electron beam and ion beam processing and fabrication I Utke, P Hoffmann, J Melngailis Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008 | 1237 | 2008 |
| Nanofabrication using focused ion and electron beams: principles and applications I Utke, S Moshkalev, P Russell Oxford University Press, 2012 | 340 | 2012 |
| Measurement of the bending strength of vapor− liquid− solid grown silicon nanowires S Hoffmann, I Utke, B Moser, J Michler, SH Christiansen, V Schmidt, ... Nano letters 6 (4), 622-625, 2006 | 303 | 2006 |
| Focused electron beam induced deposition of gold I Utke, P Hoffmann, B Dwir, K Leifer, E Kapon, P Doppelt Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000 | 216 | 2000 |
| High-resolution magnetic Co supertips grown by a focused electron beam I Utke, P Hoffmann, R Berger, L Scandella Applied physics letters 80 (25), 4792-4794, 2002 | 209 | 2002 |
| Submicrometer Hall devices fabricated by focused electron-beam-induced deposition G Boero, I Utke, T Bret, N Quack, M Todorova, S Mouaziz, P Kejik, ... Applied Physics Letters 86 (4), 2005 | 135 | 2005 |
| Focused-electron-beam-induced deposition of freestanding three-dimensional nanostructures of pure coalesced copper crystals I Utke, A Luisier, P Hoffmann, D Laub, PA Buffat Applied Physics Letters 81 (17), 3245-3247, 2002 | 122 | 2002 |
| Reaction and Growth Mechanisms in Al2O3 deposited via Atomic Layer Deposition: Elucidating the Hydrogen Source C Guerra-Nuñez, M Döbeli, J Michler, I Utke Chemistry of Materials 29 (20), 8690-8703, 2017 | 115 | 2017 |
| Granular Co–C nano-Hall sensors by focused-beam-induced deposition M Gabureac, L Bernau, I Utke, G Boero Nanotechnology 21 (11), 115503, 2010 | 112 | 2010 |
| Gold elliptical nanoantennas as probes for near field optical microscopy O Sqalli, I Utke, P Hoffmann, F Marquis-Weible Journal of applied physics 92 (2), 1078-1083, 2002 | 107 | 2002 |
| Electrodes for carbon nanotube devices by focused electron beam induced deposition of gold T Brintlinger, MS Fuhrer, J Melngailis, I Utke, T Bret, A Perentes, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2005 | 106 | 2005 |
| Optimized molecule supply from nozzle-based gas injection systems for focused electron-and ion-beam induced deposition and etching: simulation and experiment V Friedli, I Utke Journal of Physics D: Applied Physics 42 (12), 125305, 2009 | 105 | 2009 |
| Boron nitride nanoporous membranes with high surface charge by atomic layer deposition M Weber, B Koonkaew, S Balme, I Utke, F Picaud, I Iatsunskyi, E Coy, ... ACS applied materials & interfaces 9 (19), 16669-16678, 2017 | 94 | 2017 |
| Cross Section Investigations of Compositions and Sub‐Structures of Tips Obtained by Focused Electron Beam Induced Deposition I Utke, J Michler, PH Gasser, C Santschi, D Laub, M Cantoni, PA Buffat, ... Advanced Engineering Materials 7 (5), 323-331, 2005 | 91 | 2005 |
| High spatial resolution time-of-flight secondary ion mass spectrometry for the masses: A novel orthogonal ToF FIB-SIMS instrument with in situ AFM JA Whitby, F Östlund, P Horvath, M Gabureac, JL Riesterer, I Utke, M Hohl, ... Advances in Materials Science and Engineering 2012, 2012 | 89 | 2012 |
| Focused electron beam-based 3D nanoprinting for scanning probe microscopy: a review H Plank, R Winkler, CH Schwalb, J Hütner, JD Fowlkes, PD Rack, I Utke, ... Micromachines 11 (1), 48, 2019 | 86 | 2019 |
| Small, minimally invasive, direct: electrons induce local reactions of adsorbed functional molecules on the nanoscale I Utke, A Gölzhäuser Angewandte Chemie International Edition 49 (49), 9328-9330, 2010 | 86 | 2010 |
| Nanocrystalline-to-amorphous transition in nanolaminates grown by low temperature atomic layer deposition and related mechanical properties R Raghavan, M Bechelany, M Parlinska, D Frey, WM Mook, A Beyer, ... Applied physics letters 100 (19), 2012 | 83 | 2012 |
| Continuum models of focused electron beam induced processing M Toth, C Lobo, V Friedli, A Szkudlarek, I Utke Beilstein journal of nanotechnology 6 (1), 1518-1540, 2015 | 78 | 2015 |
| Thermal effects during focused electron beam induced deposition of nanocomposite magnetic-cobalt-containing tips I Utke, T Bret, D Laub, P Buffat, L Scandella, P Hoffmann Microelectronic engineering 73, 553-558, 2004 | 78 | 2004 |
Johann MichlerLaboratory Head, Empa, and Professor in Materials Science, EPFLBestätigte E-Mail-Adresse bei empa.ch
